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Journal Articles
- 2017
[j8]Sören Hommel, Nicole Killat, A. Altes, Thomas Schweinböck, Franz Kreupl
:
Determination of doping type by calibrated capacitance scanning microwave microscopy. Microelectron. Reliab. 76-77: 218-221 (2017)- 2016
- [j7]Sören Hommel, Nicole Killat, Andreas Altes, Thomas Schweinböck, Doris Schmitt-Landsiedel, Marco Silvestri, Oliver Haeberlen:
Scanning Microwave Microscopy for Electronic Device Analysis on Nanometre Scale. Microelectron. Reliab. 64: 310-312 (2016) - 2014
- [j6]Thomas Schweinböck, Sören Hommel:
Quantitative Scanning Microwave Microscopy: A calibration flow. Microelectron. Reliab. 54(9-10): 2070-2074 (2014) - 2008
- [j5]Roland Biberger, Guenther Benstetter, Thomas Schweinböck, Peter Breitschopf, Holger Goebel:
Intermittent-contact scanning capacitance microscopy versus contact mode SCM applied to 2D dopant profiling. Microelectron. Reliab. 48(8-9): 1339-1342 (2008) - 2004
- [j4]Thomas Schweinböck, S. Schömann, D. Álvarez, Marco Buzzo, Werner Frammelsberger, Peter Breitschopf, Günther Benstetter:
New trends in the application of Scanning Probe Techniques in Failure Analysis. Microelectron. Reliab. 44(9-11): 1541-1546 (2004) - [j3]Günther Benstetter, Peter Breitschopf, Werner Frammelsberger, Heiko Ranzinger, Peter Reislhuber, Thomas Schweinböck:
AFM-based scanning capacitance techniques for deep sub-micron semiconductor failure analysis. Microelectron. Reliab. 44(9-11): 1615-1619 (2004) - [j2]Marco Buzzo, Markus Leicht, Thomas Schweinböck, Mauro Ciappa, Maria Stangoni, Wolfgang Fichtner:
2D Dopant Profiling on 4H Silicon Carbide P+N Junction by Scanning Capacitance and Scanning Electron Microscopy. Microelectron. Reliab. 44(9-11): 1681-1686 (2004) - 2003
- [j1]Werner Frammelsberger, Guenther Benstetter, Thomas Schweinböck, Richard J. Stamp, Janice Kiely:
Characterization of thin and ultra-thin SiO2 films and SiO2/Si interfaces with combined conducting and topographic atomic force microscopy. Microelectron. Reliab. 43(9-11): 1465-1470 (2003)
Coauthor Index
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