"Intermittent-contact scanning capacitance microscopy versus contact mode ..."

Roland Biberger et al. (2008)

> Home

Details and statistics

DOI: 10.1016/J.MICROREL.2008.06.013

access: closed

type: Journal Article

metadata version: 2022-12-07

- view
  - electronic edition via DOI
  - unpaywalled version
  authority control:
- export record
  dblp key:
  - journals/mr/BibergerBSBG08
- ask others
- share record
  persistent URL:
  - https://dblp.org/rec/journals/mr/BibergerBSBG08
Roland Biberger, Guenther Benstetter, Thomas Schweinböck, Peter Breitschopf, Holger Goebel:
Intermittent-contact scanning capacitance microscopy versus contact mode SCM applied to 2D dopant profiling. Microelectron. Reliab. 48(8-9): 1339-1342 (2008)

manage site settings

To protect your privacy, all features that rely on external API calls from your browser are turned off by default. You need to opt-in for them to become active. All settings here will be stored as cookies with your web browser. For more information see our F.A.Q.