"Performance evaluation considering mask misalignment in multiple ..."

Haitong Tian, Martin D. F. Wong (2016)

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DOI: 10.1109/ISQED.2016.7479199

access: closed

type: Conference or Workshop Paper

metadata version: 2022-10-02

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Haitong Tian, Martin D. F. Wong:
Performance evaluation considering mask misalignment in multiple patterning decomposition. ISQED 2016: 192-197

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