"Data-Based Switching Feedforward Control for Repeating and Varying Tasks: ..."

Min Li et al. (2019)

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DOI: 10.1109/TIE.2018.2886804

access: closed

type: Journal Article

metadata version: 2020-11-04

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Min Li, Yu Zhu, Kaiming Yang, Laihao Yang, Chuxiong Hu:
Data-Based Switching Feedforward Control for Repeating and Varying Tasks: With Application to an Ultraprecision Wafer Stage. IEEE Trans. Ind. Electron. 66(11): 8670-8680 (2019)

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