"Front-end of line and middle-of-line time-dependent dielectric breakdown ..."

Kexin Yang et al. (2017)

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DOI: 10.1016/J.MICROREL.2017.06.038

access: closed

type: Journal Article

metadata version: 2022-01-06

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Kexin Yang, Taizhi Liu, Rui Zhang, Dae Hyun Kim, Linda Milor:
Front-end of line and middle-of-line time-dependent dielectric breakdown reliability simulator for logic circuits. Microelectron. Reliab. 76-77: 81-86 (2017)

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