"Effective work-function control technique applicable to p-type FinFET ..."

Shimpei Yamaguchi et al. (2017)

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DOI: 10.1016/J.MICROREL.2017.04.004

access: closed

type: Journal Article

metadata version: 2020-02-22

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Shimpei Yamaguchi, Zeynel Bayindir, Xiaoli He, Suresh Uppal, Purushothaman Srinivasan, Chloe Yong, Dongil Choi, Manoj Joshi, Hyuck Soo Yang, Owen Hu, Srikanth Samavedam, Dong Kyun Sohn:
Effective work-function control technique applicable to p-type FinFET high-k/metal gate devices. Microelectron. Reliab. 72: 80-84 (2017)

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