"Effect of mechanical stress induced by etch-stop nitride: impact on ..."

Shinya Ito et al. (2002)

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DOI: 10.1016/S0026-2714(01)00238-4

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type: Journal Article

metadata version: 2020-02-22

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Shinya Ito, Hiroaki Namba, Tsuyoshi Hirata, Koichi Ando, Shin Koyama, Nobuyuki Ikezawa, Tatsuya Suzuki, Takehiro Saitoh, Tadahiko Horiuchi:
Effect of mechanical stress induced by etch-stop nitride: impact on deep-submicron transistor performance. Microelectron. Reliab. 42(2): 201-209 (2002)

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