"Displacement current sensor for contact and intermittent contact scanning ..."

Roland Biberger, Guenther Benstetter, Holger Goebel (2009)

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DOI: 10.1016/J.MICROREL.2009.07.007

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type: Journal Article

metadata version: 2022-12-07

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Roland Biberger, Guenther Benstetter, Holger Goebel:
Displacement current sensor for contact and intermittent contact scanning capacitance microscopy. Microelectron. Reliab. 49(9-11): 1192-1195 (2009)

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