"Machine learning-based novelty detection for faulty wafer detection in ..."

Dongil Kim et al. (2012)

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DOI: 10.1016/J.ESWA.2011.09.088

access: closed

type: Journal Article

metadata version: 2023-03-21

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Dongil Kim, Pilsung Kang, Sungzoon Cho, Hyoungjoo Lee, Seungyong Doh:
Machine learning-based novelty detection for faulty wafer detection in semiconductor manufacturing. Expert Syst. Appl. 39(4): 4075-4083 (2012)

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