"A virtual metrology system for semiconductor manufacturing."

Pilsung Kang et al. (2009)

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DOI: 10.1016/J.ESWA.2009.05.053

access: closed

type: Journal Article

metadata version: 2023-03-21

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  - https://dblp.org/rec/journals/eswa/KangLCKPPD09
Pilsung Kang, Hyoungjoo Lee, Sungzoon Cho, Dongil Kim, Jinwoo Park, Chan-Kyoo Park, Seungyong Doh:
A virtual metrology system for semiconductor manufacturing. Expert Syst. Appl. 36(10): 12554-12561 (2009)

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