"Optical lithography extension with double patterning."

Shigeki Nojima (2013)

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DOI: 10.1145/2451916.2451936

access: closed

type: Conference or Workshop Paper

metadata version: 2018-11-06

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Shigeki Nojima:
Optical lithography extension with double patterning. ISPD 2013: 68

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