"Comprehensive Analysis of Hole-Trapping in SiN Films with a Wide Range of ..."

Harumi Seki et al. (2023)

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DOI: 10.1109/IRPS48203.2023.10118083

access: closed

type: Conference or Workshop Paper

metadata version: 2023-05-24

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Harumi Seki, Reika Ichihara, Yusuke Higashi, Yasushi Nakasaki, Masumi Saitoh, Masamichi Suzuki:
Comprehensive Analysis of Hole-Trapping in SiN Films with a Wide Range of Time Constants Based on Dynamic C-V. IRPS 2023: 1-7

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