"A Three-Degree-of-Freedom Large-Stroke Flexible Tip-Tilt-Piston Stage ..."

Jinfu Sima et al. (2024)

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DOI: 10.1007/978-981-96-0780-8_25

access: closed

type: Conference or Workshop Paper

metadata version: 2025-02-12

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Jinfu Sima, Yunzhuang Chen, Zhihao Xu, Leijie Lai:
A Three-Degree-of-Freedom Large-Stroke Flexible Tip-Tilt-Piston Stage Driven by Voice Coil Motor. ICIRA (7) 2024: 347-359

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