"Layout small-angle rotation and shift for EUV defect mitigation."

Hongbo Zhang et al. (2012)

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DOI: 10.1145/2429384.2429394

access: closed

type: Conference or Workshop Paper

metadata version: 2022-10-02

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Hongbo Zhang, Yuelin Du, Martin D. F. Wong, Yunfei Deng, Pawitter Mangat:
Layout small-angle rotation and shift for EUV defect mitigation. ICCAD 2012: 43-49

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