"Block copolymer directed self-assembly (DSA) aware contact layer ..."

Yuelin Du et al. (2013)

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DOI: 10.1109/ICCAD.2013.6691117

access: closed

type: Conference or Workshop Paper

metadata version: 2022-10-02

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  - https://dblp.org/rec/conf/iccad/DuGWYWZ013
Yuelin Du, Daifeng Guo, Martin D. F. Wong, He Yi, H.-S. Philip Wong, Hongbo Zhang, Qiang Ma:
Block copolymer directed self-assembly (DSA) aware contact layer optimization for 10 nm 1D standard cell library. ICCAD 2013: 186-193

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