"SMATO: Simultaneous mask and target optimization for improving ..."

Shayak Banerjee, Kanak B. Agarwal, Michael Orshansky (2010)

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DOI: 10.1109/ICCAD.2010.5654341

access: closed

type: Conference or Workshop Paper

metadata version: 2023-03-24

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Shayak Banerjee, Kanak B. Agarwal, Michael Orshansky:
SMATO: Simultaneous mask and target optimization for improving lithographic process window. ICCAD 2010: 100-106

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