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"Spacer-is-dielectric-compliant detailed routing for self-aligned double ..."
Yuelin Du et al. (2013)
- Yuelin Du, Qiang Ma, Hua Song, James P. Shiely, Gerard Luk-Pat, Alexander Miloslavsky, Martin D. F. Wong:
Spacer-is-dielectric-compliant detailed routing for self-aligned double patterning lithography. DAC 2013: 93:1-93:6
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