"Analyzing electrical effects of RTA-driven local anneal temperature variation."

Vivek Joshi et al. (2010)

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DOI: 10.1109/ASPDAC.2010.5419792

access: closed

type: Conference or Workshop Paper

metadata version: 2024-06-04

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Vivek Joshi, Kanak Agarwal, Dennis Sylvester, David T. Blaauw:
Analyzing electrical effects of RTA-driven local anneal temperature variation. ASP-DAC 2010: 739-744

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