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Journal Articles
- 2023
[j6]Zhenjun Wang
, Zhenxiang Yi, Ming Qin, Qing-An Huang, Zai-Fa Zhou:
Linearity and Sensitivity Analysis of MEMS Thermal Wind Sensor via Analytical Model. IEEE Trans. Instrum. Meas. 72: 1-9 (2023)- 2022
- [j5]Zhenjun Wang, Zhenxiang Yi, Run Tian, Ming Qin, Qing-An Huang, Zai-Fa Zhou, Kevin Long:
Analysis and Compensation of Benchmark Drift of Micromachined Thermal Wind Sensor Caused by Packaging Asymmetry. IEEE Trans. Ind. Electron. 69(1): 950-959 (2022) - 2019
- [j4]Jiale Su, Xinwei Zhang, Guoping Zhou, Jianjian Gu, Changfeng Xia, Zai-Fa Zhou, Qing-An Huang:
Fabrication of a Piezoresistive Barometric Pressure Sensor by a Silicon-on-Nothing Technology. J. Sensors 2019: 5408268:1-5408268:10 (2019) - 2017
- [j3]Lili Gao, Zai-Fa Zhou, Qing-An Huang:
A Generalized Polynomial Chaos-Based Approach to Analyze the Impacts of Process Deviations on MEMS Beams. Sensors 17(11): 2561 (2017) - 2016
- [j2]Yifan Gu, Zai-Fa Zhou, Chao Sun, Wei-Hua Li, Qing-An Huang:
In-Situ Testing of the Thermal Diffusivity of Polysilicon Thin Films. Micromachines 7(10): 174 (2016) - 2007
- [j1]Zai-Fa Zhou, Qing-An Huang, Wei-Hua Li, Wei Lu:
A Novel 3-D Dynamic Cellular Automata Model for Photoresist-Etching Process Simulation. IEEE Trans. Comput. Aided Des. Integr. Circuits Syst. 26(1): 100-114 (2007)
Coauthor Index
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