"Fabrication of a Piezoresistive Barometric Pressure Sensor by a ..."

Jiale Su et al. (2019)

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DOI: 10.1155/2019/5408268

access: open

type: Journal Article

metadata version: 2025-01-19

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Jiale Su, Xinwei Zhang, Guoping Zhou, Jianjian Gu, Changfeng Xia, Zai-Fa Zhou, Qing-An Huang:
Fabrication of a Piezoresistive Barometric Pressure Sensor by a Silicon-on-Nothing Technology. J. Sensors 2019: 5408268:1-5408268:10 (2019)

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