"Linearity and Sensitivity Analysis of MEMS Thermal Wind Sensor via ..."

Zhenjun Wang et al. (2023)

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DOI: 10.1109/TIM.2022.3219491

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type: Journal Article

metadata version: 2023-01-31

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Zhenjun Wang, Zhenxiang Yi, Ming Qin, Qing-An Huang, Zai-Fa Zhou:
Linearity and Sensitivity Analysis of MEMS Thermal Wind Sensor via Analytical Model. IEEE Trans. Instrum. Meas. 72: 1-9 (2023)

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