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Mark Pallay

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Journal Articles

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2020
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Mark Pallay, Ronald N. Miles, Shahrzad Towfighian:
A Tunable Electrostatic MEMS Pressure Switch. IEEE Trans. Ind. Electron. 67(11): 9833-9840 (2020)

Conference and Workshop Papers

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2019
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Md. Nahid Hasan, Mark Pallay, Shahrzad Towfighian:
Threshold Pressure Sensing Using Parametric Resonance in Electrostatic MEMS. IEEE SENSORS 2019: 1-4
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Mark Pallay, Shahrzad Towfighian:
A Combined MEMS Threshold Pressure Sensor and Switch. IEEE SENSORS 2019: 1-4

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