"A Tunable Electrostatic MEMS Pressure Switch."

Mark Pallay, Ronald N. Miles, Shahrzad Towfighian (2020)

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DOI: 10.1109/TIE.2019.2956377

access: closed

type: Journal Article

metadata version: 2020-08-06

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Mark Pallay, Ronald N. Miles, Shahrzad Towfighian:
A Tunable Electrostatic MEMS Pressure Switch. IEEE Trans. Ind. Electron. 67(11): 9833-9840 (2020)

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