"A Combined MEMS Threshold Pressure Sensor and Switch."

Mark Pallay, Shahrzad Towfighian (2019)

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DOI: 10.1109/SENSORS43011.2019.8956554

access: closed

type: Conference or Workshop Paper

metadata version: 2022-12-16

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Mark Pallay, Shahrzad Towfighian:
A Combined MEMS Threshold Pressure Sensor and Switch. IEEE SENSORS 2019: 1-4

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