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Akemi Moniwa

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Journal Articles

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1987
[j3]
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Akemi Moniwa, Toshiharu Matsuzawa, Tetsuo Ito, Hideo Sunami:
A Three-Dimensional Photoresist Imaging Process Simulator for Strong Standing-Wave Effect Environment. IEEE Trans. Comput. Aided Des. Integr. Circuits Syst. 6(3): 431-438 (1987)
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Masanori Ohgo, Yasuko Takano, Akemi Moniwa, Shuichi Yamamoto, Yoshio Sakai, Hiroo Masuda, Hideo Sunami:
A Two-Dimensional Integrated Process Simulator: SPIRIT-I. IEEE Trans. Comput. Aided Des. Integr. Circuits Syst. 6(3): 439-445 (1987)
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Teruo Matsuzawa, Akemi Moniwa, N. Hasegawa, Hideo Sunami:
Two-Dimensional Simulation of Photolithography on Reflective Stepped Substrate. IEEE Trans. Comput. Aided Des. Integr. Circuits Syst. 6(3): 446-451 (1987)

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