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N. Hasegawa

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1980 – 1989

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1987
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Teruo Matsuzawa, Akemi Moniwa, N. Hasegawa, Hideo Sunami:
Two-Dimensional Simulation of Photolithography on Reflective Stepped Substrate. IEEE Trans. Comput. Aided Des. Integr. Circuits Syst. 6(3): 446-451 (1987)

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