"Two-Dimensional Simulation of Photolithography on Reflective Stepped ..."

Teruo Matsuzawa et al. (1987)

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DOI: 10.1109/TCAD.1987.1270291

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type: Journal Article

metadata version: 2020-09-24

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Teruo Matsuzawa, Akemi Moniwa, N. Hasegawa, Hideo Sunami:
Two-Dimensional Simulation of Photolithography on Reflective Stepped Substrate. IEEE Trans. Comput. Aided Des. Integr. Circuits Syst. 6(3): 446-451 (1987)

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