"Development of an ultrasonic motor as a fine-orienting stage."

Eko Purwanto, Shigeki Toyama (2001)

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DOI: 10.1109/70.954758

access: closed

type: Journal Article

metadata version: 2020-05-19

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Eko Purwanto, Shigeki Toyama:
Development of an ultrasonic motor as a fine-orienting stage. IEEE Trans. Robotics Autom. 17(4): 464-471 (2001)

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