"Multi-Row Guiding Template Design for Lamellar Directed Self-Assembly with ..."

Yi-Ting Lin, Kang-Ting Fan, Iris Hui-Ru Jiang (2025)

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DOI: 10.1145/3711851

access: closed

type: Journal Article

metadata version: 2025-02-26

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Yi-Ting Lin, Kang-Ting Fan, Iris Hui-Ru Jiang:
Multi-Row Guiding Template Design for Lamellar Directed Self-Assembly with Self-Aligned Via Process. ACM Trans. Design Autom. Electr. Syst. 30(2): 29:1-29:17 (2025)

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