"An Accelerated Stress Test Method for Electrostatically Driven MEMS Devices."

Jinyu Jason Ruan et al. (2012)

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DOI: 10.1109/TIM.2011.2161937

access: closed

type: Journal Article

metadata version: 2024-08-04

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Jinyu Jason Ruan, Nicolas Monnereau, David Trémouilles, Nicolas Mauran, Fabio Coccetti, Nicolas Nolhier, Robert Plana:
An Accelerated Stress Test Method for Electrostatically Driven MEMS Devices. IEEE Trans. Instrum. Meas. 61(2): 456-461 (2012)

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