"Spectroscopic Measurement of Material Properties Using an Improved ..."

Mathias Klenner et al. (2016)

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DOI: 10.1109/TIM.2016.2594022

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type: Journal Article

metadata version: 2020-06-08

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Mathias Klenner, Christian Zech, Axel Hülsmann, Jutta Kuhn, Michael Schlechtweg, Oliver Ambacher:
Spectroscopic Measurement of Material Properties Using an Improved Millimeter-Wave Ellipsometer Based on Metallic Substrates. IEEE Trans. Instrum. Meas. 65(11): 2551-2559 (2016)

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