"Intelligent Tracking Error Prediction and Feedforward Compensation for ..."

Yixuan Meng et al. (2023)

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DOI: 10.1109/TII.2022.3199263

access: closed

type: Journal Article

metadata version: 2024-04-15

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Yixuan Meng, Xiangyuan Wang, Wei-Wei Huang, Linlin Li, Chuxiong Hu, Xinquan Zhang, LiMin Zhu:
Intelligent Tracking Error Prediction and Feedforward Compensation for Nanopositioning Stages With High-Bandwidth Control. IEEE Trans. Ind. Informatics 19(5): 6460-6470 (2023)

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