"Development of a Compact and Contactless Stage Capable of ..."

Lipeng Wang et al. (2024)

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DOI: 10.1109/TIE.2024.3363721

access: closed

type: Journal Article

metadata version: 2024-09-20

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Lipeng Wang, Jiang Wu, Zhaochun Ding, Ranxu Zhang, Teng Chen, Xuewen Rong, Rui Song, Yibin Li:
Development of a Compact and Contactless Stage Capable of Levitating/Rotating Wafer Functioning as an Ultrasonically Virtual Hand. IEEE Trans. Ind. Electron. 71(11): 14610-14619 (2024)

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