"Pose Sensing and Servo Control of the Compliant Nanopositioners Based on ..."

Hai Li et al. (2021)

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DOI: 10.1109/TIE.2020.2977572

access: closed

type: Journal Article

metadata version: 2021-01-09

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Hai Li, Benliang Zhu, Xianmin Zhang, Junyang Wei, Sergej Fatikow:
Pose Sensing and Servo Control of the Compliant Nanopositioners Based on Microscopic Vision. IEEE Trans. Ind. Electron. 68(4): 3324-3335 (2021)

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