"CTM-SRAF: Continuous Transmission Mask-Based Constraint-Aware ..."

Ziyang Yu et al. (2023)

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DOI: 10.1109/TCAD.2023.3239559

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type: Journal Article

metadata version: 2023-10-14

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Ziyang Yu, Peiyu Liao, Yuzhe Ma, Bei Yu, Martin D. F. Wong:
CTM-SRAF: Continuous Transmission Mask-Based Constraint-Aware Subresolution Assist Feature Generation. IEEE Trans. Comput. Aided Des. Integr. Circuits Syst. 42(10): 3402-3411 (2023)

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