"Anisotropic Mesh Refinement for the Simulation of Three-Dimensional ..."

W. Wessner et al. (2006)

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DOI: 10.1109/TCAD.2005.862750

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type: Journal Article

metadata version: 2020-09-24

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W. Wessner, Johann Cervenka, Clemens Heitzinger, Andreas Hössinger, Siegfried Selberherr:
Anisotropic Mesh Refinement for the Simulation of Three-Dimensional Semiconductor Manufacturing Processes. IEEE Trans. Comput. Aided Des. Integr. Circuits Syst. 25(10): 2129-2139 (2006)

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