"Data Efficient Lithography Modeling With Transfer Learning and Active Data ..."

Yibo Lin et al. (2019)

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DOI: 10.1109/TCAD.2018.2864251

access: closed

type: Journal Article

metadata version: 2020-09-24

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Yibo Lin, Meng Li, Yuki Watanabe, Taiki Kimura, Tetsuaki Matsunawa, Shigeki Nojima, David Z. Pan:
Data Efficient Lithography Modeling With Transfer Learning and Active Data Selection. IEEE Trans. Comput. Aided Des. Integr. Circuits Syst. 38(10): 1900-1913 (2019)

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