"MILP-Based Optimization of 2-D Block Masks for Timing-Aware Dummy Segment ..."

Peter Debacker et al. (2017)

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DOI: 10.1109/TCAD.2017.2685594

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type: Journal Article

metadata version: 2020-09-24

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Peter Debacker, Kwangsoo Han, Andrew B. Kahng, Hyein Lee, Praveen Raghavan, Lutong Wang:
MILP-Based Optimization of 2-D Block Masks for Timing-Aware Dummy Segment Removal in Self-Aligned Multiple Patterning Layouts. IEEE Trans. Comput. Aided Des. Integr. Circuits Syst. 36(7): 1075-1088 (2017)

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