"A Cyclic Scheduling Approach to Single-Arm Cluster Tools With Multiple ..."

Jipeng Wang et al. (2019)

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DOI: 10.1109/TASE.2018.2878063

access: closed

type: Journal Article

metadata version: 2025-01-19

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Jipeng Wang, Chunrong Pan, Hesuan Hu, Liang Li, Yuan Zhou:
A Cyclic Scheduling Approach to Single-Arm Cluster Tools With Multiple Wafer Types and Residency Time Constraints. IEEE Trans Autom. Sci. Eng. 16(3): 1373-1386 (2019)

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