"Tracking Control of Nanopositioning Stages Using Parallel Resonant ..."

Yi-Dan Tao et al. (2021)

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DOI: 10.1109/TASE.2020.2998773

access: closed

type: Journal Article

metadata version: 2024-02-12

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Yi-Dan Tao, Zhiwei Zhu, Qingsong Xu, Han-Xiong Li, Limin Zhu:
Tracking Control of Nanopositioning Stages Using Parallel Resonant Controllers for High-Speed Nonraster Sequential Scanning. IEEE Trans Autom. Sci. Eng. 18(3): 1218-1228 (2021)

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