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"Wafer Delay Analysis and Workload Balancing of Parallel Chambers for ..."

Sung-Gil Ko, Tae-Sun Yu, Tae-Eog Lee (2021)

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DOI: 10.1109/TASE.2021.3061140

access: closed

type: Journal Article

metadata version: 2021-07-13

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Sung-Gil Ko, Tae-Sun Yu, Tae-Eog Lee:
Wafer Delay Analysis and Workload Balancing of Parallel Chambers for Dual-Armed Cluster Tools With Multiple Wafer Types. IEEE Trans Autom. Sci. Eng. 18(3): 1516-1526 (2021)

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