"Partially Observable Markov Decision Process for Monitoring Multilayer ..."

Marzieh Khakifirooz, Mahdi Fathi, Chen-Fu Chien (2021)

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DOI: 10.1109/TASE.2020.3017481

access: closed

type: Journal Article

metadata version: 2023-04-17

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Marzieh Khakifirooz, Mahdi Fathi, Chen-Fu Chien:
Partially Observable Markov Decision Process for Monitoring Multilayer Wafer Fabrication. IEEE Trans Autom. Sci. Eng. 18(4): 1742-1753 (2021)

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