"Optimal and Robust Design Method for Two-Chip Out-of-Plane ..."

Sangmin Lee et al. (2010)

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DOI: 10.3390/S101210524

access: open

type: Journal Article

metadata version: 2021-02-10

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Sangmin Lee, Hyoungho Ko, Byoung-Doo Choi, Dong-Il Dan Cho:
Optimal and Robust Design Method for Two-Chip Out-of-Plane Microaccelerometers. Sensors 10(12): 10524-10544 (2010)

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