"Nonlinear Parameter Identification of a Resonant Electrostatic MEMS Actuator."

Majed S. Al-Ghamdi et al. (2017)

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DOI: 10.3390/S17051121

access: open

type: Journal Article

metadata version: 2023-09-30

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  - https://dblp.org/rec/journals/sensors/Al-GhamdiAPLKAH17
Majed S. Al-Ghamdi, Ayman M. Alneamy, Sangtak Park, Beichen Li, Mahmoud E. Khater, Eihab M. Abdel-Rahman, Glenn R. Heppler, Mustafa Yavuz:
Nonlinear Parameter Identification of a Resonant Electrostatic MEMS Actuator. Sensors 17(5): 1121 (2017)

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