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"Nonlinear Parameter Identification of a Resonant Electrostatic MEMS Actuator."
Majed S. Al-Ghamdi et al. (2017)
- Majed S. Al-Ghamdi
, Ayman M. Alneamy, Sangtak Park
, Beichen Li, Mahmoud E. Khater
, Eihab M. Abdel-Rahman
, Glenn R. Heppler, Mustafa Yavuz
:
Nonlinear Parameter Identification of a Resonant Electrostatic MEMS Actuator. Sensors 17(5): 1121 (2017)

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