"Optimally Scheduling Dual-Arm Multi-Cluster Tools to Process Two Wafer Types."

Qinghua Zhu et al. (2022)

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DOI: 10.1109/LRA.2022.3157031

access: closed

type: Journal Article

metadata version: 2024-08-04

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Qinghua Zhu, GengHong Wang, Yan Hou, Naiqi Wu, Yan Qiao:
Optimally Scheduling Dual-Arm Multi-Cluster Tools to Process Two Wafer Types. IEEE Robotics Autom. Lett. 7(3): 5920-5927 (2022)

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