"Planar positioning stage for micro machining."

J. Bauer et al. (2013)

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DOI: 10.1007/S11740-013-0474-2

access: closed

type: Journal Article

metadata version: 2021-10-14

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J. Bauer, Dominik Kern, Serdal Ayhan, Steffen Scherr, Jürgen Fleischer, Wolfgang Seemann, Thomas Zwick:
Planar positioning stage for micro machining. Prod. Eng. 7(5): 511-516 (2013)

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