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"Planar positioning stage for micro machining."
J. Bauer et al. (2013)
- J. Bauer, Dominik Kern
, Serdal Ayhan, Steffen Scherr, Jürgen Fleischer
, Wolfgang Seemann, Thomas Zwick
:
Planar positioning stage for micro machining. Prod. Eng. 7(5): 511-516 (2013)
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