"Experimental and simulation studies of resistivity in nanoscale copper films."

A. Emre Yarimbiyik et al. (2009)

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DOI: 10.1016/J.MICROREL.2008.11.003

access: closed

type: Journal Article

metadata version: 2021-10-14

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A. Emre Yarimbiyik, Harry A. Schafft, Richard A. Allen, Mark D. Vaudin, Mona E. Zaghloul:
Experimental and simulation studies of resistivity in nanoscale copper films. Microelectron. Reliab. 49(2): 127-134 (2009)

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