"Critical reliability challenges in scaling SiO2-based ..."

Ernest Y. Wu et al. (2003)

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DOI: 10.1016/S0026-2714(03)00169-0

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type: Journal Article

metadata version: 2020-02-22

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Ernest Y. Wu, Jordi Suñé, Wing L. Lai, Alex Vayshenker, Edward J. Nowak, David L. Harmon:
Critical reliability challenges in scaling SiO₂-based dielectric to its limit. Microelectron. Reliab. 43(8): 1175-1184 (2003)

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