"Investigation of the surface silica layer on porous poly-Si thin films."

Hei Wong et al. (2001)

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DOI: 10.1016/S0026-2714(00)00098-6

access: closed

type: Journal Article

metadata version: 2020-02-22

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Hei Wong, P. G. Han, M. C. Poon, Y. Gao:
Investigation of the surface silica layer on porous poly-Si thin films. Microelectron. Reliab. 41(2): 179-184 (2001)

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