"Defects in silicon oxynitride gate dielectric films."

Hei Wong, V. A. Gritsenko (2002)

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DOI: 10.1016/S0026-2714(02)00005-7

access: closed

type: Journal Article

metadata version: 2020-02-22

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Hei Wong, V. A. Gritsenko:
Defects in silicon oxynitride gate dielectric films. Microelectron. Reliab. 42(4-5): 597-605 (2002)

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